Fabrication and characterization of PZT thin-film vibrators for micromotors
- 1 May 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 48 (2), 157-165
- https://doi.org/10.1016/0924-4247(95)00994-9
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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