Ion microbeam applications in semiconductors
- 1 March 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 30 (3), 480-485
- https://doi.org/10.1016/0168-583x(88)90045-6
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Channeling contrast microscopy: Application to semiconductor structuresApplied Physics Letters, 1983
- Helium Microprobe Analysis of Semiconductor MaterialsIEEE Transactions on Nuclear Science, 1983
- Total quantitative recording of elemental maps and spectra with a scanning microprobeJournal of Microscopy, 1979
- On the determination of optimum depth-resolution conditions for rutherford backscattering analysisNuclear Instruments and Methods, 1978