Characterization of polycrystalline α-Al2O3, zirconium implanted and annealed at various temperatures
- 1 February 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 46 (1), 89-93
- https://doi.org/10.1016/0168-583x(90)90674-j
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The structure and properties of ion-implanted A12O3Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Formation of amorphous layers in Al2O3 by ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Near surface modification of α-Al2O3 by ion implantation followed by thermal annealingNuclear Instruments and Methods in Physics Research, 1983