Sulphur erosion by 1.0 Mev helium ions

Abstract

Experimental results on erosion of thin sulphur layers by 1.0 MeV He ions are presented in the temperature range between 77 and 300 K. At the lower temperatures (< 200 K) the erosion yield Y is constant and equal to 10 atoms per He ion. Y does not depend on the ion current (0.1-3 μA/cm²), while at the higher temperatures (> 200 K) the erosion yield increases strongly up to two orders of magnitude and it depends on the ion current testifying for sublimation induced by beam heating. The method to prepare in situ the sulphur films and analysis techniques used for thickness measurements have been discussed in detail.