Capacitive humidity sensing properties of hydrothermally-etched silicon nano-porous pillar array
- 22 July 2004
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 105 (2), 219-222
- https://doi.org/10.1016/j.snb.2004.06.004
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Nanostructured porous silicon for gas sensor applicationsMaterials Science and Technology, 2002
- Rapid, reversible, sensitive porous silicon gas sensorJournal of Applied Physics, 2002
- Organic vapour sensing by current response of porous silicon layerJournal of Physics D: Applied Physics, 2001
- Role of parasitics in humidity sensing by porous siliconSensors and Actuators A: Physical, 2001
- Humidity sensors using porous silicon layer with mesa structureJournal of Physics D: Applied Physics, 2000
- Tunable superstructures in hydrothermally etched iron-passivated porous siliconApplied Physics Letters, 1999
- Nondegrading Photoluminescence in Porous SiliconPhysical Review Letters, 1998
- Porous silicon lateral superlatticesApplied Physics Letters, 1997
- Layered structure of luminescent porous siliconJournal of Applied Physics, 1994
- Morphologies and photoluminescence of porous silicon under different etching and oxidation conditionsJournal of Applied Physics, 1994