Humidity sensors using porous silicon layer with mesa structure
- 24 July 2000
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 33 (15), 1781-1784
- https://doi.org/10.1088/0022-3727/33/15/305
Abstract
No abstract availableKeywords
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- Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafersApplied Physics Letters, 1990
- Investigations of porous silicon for vapor sensingSensors and Actuators A: Physical, 1990