Identification of hydrogen platelets in proton-bombarded GaAs
- 1 August 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (3), 941-945
- https://doi.org/10.1063/1.337789
Abstract
The technique of cross-sectional transmission electron microscopy has been applied to study the nature of the radiation damage in GaAs bombarded with 300 keV protons to total doses of 1015 and 5×1015 protons cm−2. The results indicate that upon annealing at temperatures of 500 °C and above, the precipitated damage becomes visible in the form of hydrogen platelets (i.e., hydrogen-filled edge vacancy loops) on the {110} cleavage planes of GaAs.Keywords
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