Damage distribution and measure of projected range in proton bombarded GaAs
- 1 January 1982
- journal article
- review article
- Published by Taylor & Francis in Radiation Effects
- Vol. 60 (1-4), 147-154
- https://doi.org/10.1080/00337578208242787
Abstract
The technique of cross-sectional transmission electron microscopy has been applied to obtain information on the projected range of protons and their damage distribution in gallium arsenide. The crystals were subjected to dosages of 1 × 1015 to 1 × 1017 protons cm−2 and proton energies of 100, 200 and 300 keV. Within this energy range the damage shows a Gaussian distribution about a mean range which correlates closely with LSS values. The experimentally determined damage profiles are found to be essentially independent of proton energy and the temperature of post implantation anneal for a given dosage. The displacement damage as reflected by the damage profiles is found to be linear with proton dose. Finally, it is estimated that defects became visible in unannealed crystals when each atom is, on the average, displaced at least once during irradiation.Keywords
This publication has 9 references indexed in Scilit:
- Impurity-peak formation during proton-enhanced diffusion of phosphorus and boron in siliconJournal of Applied Physics, 1979
- Electrical profiling and optical activation studies of Be-implanted GaAsJournal of Applied Physics, 1977
- Electrical measurement of the lateral spread of the proton isolation layer in GaAsJournal of Applied Physics, 1977
- Redistribution of boron in silicon after high−temperature proton irradiationApplied Physics Letters, 1975
- Cross-sectional specimens for transmission electron microscopyJournal of Applied Physics, 1974
- Estimation of impurity profiles in ion-implanted amorphous targets using joined half-Gaussian distributionsApplied Physics Letters, 1973
- Optical and electrical properties of proton-bombarded p-type GaAsJournal of Applied Physics, 1973
- Low energy boron and phosphorus implants in silicon (b) doping profilesRadiation Effects, 1970
- The Displacement of Atoms in Solids by RadiationReports on Progress in Physics, 1955