Enhanced Blue-Light Emission from an Indium-Treated Porous Silicon Device

Abstract
We present the technology and the performance of blue-light-emitting porous silicon devices. The devices are fabricated using porous silicon formation with UV-light applied. Furthermore, indium is electroplated into the pores, causing an increase of the quantum efficiency. The blue electroluminescence exhibits a peak maximum around 480 nm and an external quantum efficiency of 0.5×10-2 %. Rutherford backscattering spectroscopy (RBS) was employed to measure the stoichiometry and the depth profile of indium in the porous layer.