Traps in Al2O3 detected by tunneling
- 1 October 1976
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (10), 4593-4597
- https://doi.org/10.1063/1.322384
Abstract
New structure, quite different from inelastic tunneling peaks, has been observed in electron tunneling spectra of MOM junctions. A capacitance peak is associated with this structure, which is attributed to traps in the oxide at energies smaller than those previously reported. The C‐V characteristics calculated using a single‐energy trap model agree with experimental results; however, no satisfactory explanation has yet been found to account for the strong temperature dependence of the trap energy levels.Keywords
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