Enhanced Oxidation of Silicon by Ion Implantation and its Novel Applications
- 1 January 1975
- book chapter
- Published by Springer Nature
Abstract
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This publication has 3 references indexed in Scilit:
- Thermal Oxidation of Silicon after Ion ImplantationJournal of the Electrochemical Society, 1973
- Chemical and Electrical Behaviour of Ion Implanted SiO2 FilmsPublished by Springer Nature ,1971
- Radiation Enhanced Diffusion in SolidsJournal of Applied Physics, 1958