Electrical conduction mechanism in high-dielectric-constant (Ba0.5,Sr0.5)TiO3 thin films
- 28 January 2002
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 80 (4), 655-657
- https://doi.org/10.1063/1.1436527
Abstract
The electrical conduction mechanism of (Ba0.5,Sr0.5)TiO3 (BST) as a function of the temperature was studied. Au/BST/Pt metal–insulator–metal capacitors were fabricated. The temperature range was from 300 to 423 K. The conduction current depended on the voltage polarity. At high electrical field (>800 kV/cm) and with the Pt electrode biased negatively, the Pt/BST interface forms a Schottky barrier with a barrier height of 0.58 eV from 300 to 373 K. The Au/BST interface forms an ohmic contact. The conduction current when the Au electrode is biased negatively shows space-charge-limited-current behavior. An energy band diagram is proposed to explain the experimental results.Keywords
This publication has 11 references indexed in Scilit:
- Resistance degradation in barium strontium titanate thin filmsJournal of Applied Physics, 1999
- Depletion layer thickness and Schottky type carrier injection at the interface between Pt electrodes and (Ba, Sr)TiO3 thin filmsJournal of Applied Physics, 1999
- The electronic conduction mechanism in barium strontium titanate thin filmsApplied Physics Letters, 1998
- Oxygen vacancy mobility determined from current measurements in thin Ba0.5Sr0.5TiO3 filmsApplied Physics Letters, 1998
- A comparative study on the electrical conduction mechanisms of (Ba0.5Sr0.5)TiO3 thin films on Pt and IrO2 electrodesJournal of Applied Physics, 1998
- Leakage currents in Ba0.7Sr0.3TiO3 thin films for ultrahigh-density dynamic random access memoriesJournal of Applied Physics, 1997
- Electronic defect and trap-related current of (Ba0.4Sr0.6)TiO3 thin filmsJournal of Applied Physics, 1997
- Temperature-Dependent Current-Voltage Characteristics of Fully Processed Ba0.7Sr0.3TiO3 Capacitors Integrated in a Silicon DeviceJapanese Journal of Applied Physics, 1996
- Direct current conduction properties of sputtered Pt/(Ba0.7Sr0.3)TiO3/Pt thin films capacitorsApplied Physics Letters, 1995
- Structures and electrical properties of barium strontium titanate thin films grown by multi-ion-beam reactive sputtering techniqueJournal of Materials Research, 1995