A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etching
- 1 March 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 73 (3), 243-251
- https://doi.org/10.1016/s0924-4247(98)00225-8
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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