Tuning a Babinet-Soleil compensator for exact quarter wave retardation in an ellipsometer
- 1 June 1975
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 8 (6), 445-446
- https://doi.org/10.1088/0022-3735/8/6/002
Abstract
The method does not require any special arrangement of the ellipsometer but uses data acquired while the instrument is operating in the normal mode.Keywords
This publication has 3 references indexed in Scilit:
- Calibration of Ellipsometer Divided Circles*Journal of the Optical Society of America, 1971
- Unified Analysis of Ellipsometry Errors Due to Imperfect Components, Cell-Window Birefringence, and Incorrect Azimuth Angles*Journal of the Optical Society of America, 1971
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963