Ion beam induced conductivity and structural changes in diamondlike carbon coatings
- 3 November 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 49 (18), 1157-1159
- https://doi.org/10.1063/1.97452
Abstract
Energetic ion beam irradiation of diamondlike carbon thin films induces a decrease of 4–5 orders of magnitude in the resistivity of the films from their as-grown value of 107 Ω cm. The initial decrease in resistivity with increasing ion dose is due to the loss of hydrogen from the films with a concomitant decrease in the optical band gap. Heating the films during the irradiation greatly accelerates the rate of hydrogen loss as a function of dose. Once the hydrogen removal is complete, further irradiation increases the film conductivity by inducing the growth of microcrystallites of graphite.Keywords
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