A review of recent work on hard i-C films
- 1 December 1981
- journal article
- review article
- Published by Elsevier in Thin Solid Films
- Vol. 86 (2-3), 193-200
- https://doi.org/10.1016/0040-6090(81)90288-1
Abstract
No abstract availableKeywords
This publication has 20 references indexed in Scilit:
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- Mechanical properties of hard carbon filmsThin Solid Films, 1979
- Structure and properties of transparent and hard carbon filmsSurface Science, 1979
- Some characteristics of hard carbonaceous filmsThin Solid Films, 1977
- Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasmaThin Solid Films, 1976
- The deposition of hard surface layers by hydrocarbon cracking in a glow dischargeThin Solid Films, 1976