In situ site-specific specimen preparation for atom probe tomography
Top Cited Papers
- 17 July 2006
- journal article
- Published by Elsevier in Ultramicroscopy
- Vol. 107 (2-3), 131-139
- https://doi.org/10.1016/j.ultramic.2006.06.008
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- Minimization of Ga Induced FIB Damage Using Low Energy Clean-upMicroscopy and Microanalysis, 2006
- Characterization of ultralow-energy implants and towards the analysis of three-dimensional dopant distributions using three-dimensional atom-probe tomographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2006
- The Correlation between Ion Beam/Material Interactions and Practical FIB Specimen PreparationMicroscopy and Microanalysis, 2003
- A Novel Application of the FIB Lift-out Technique for 3-D TEM AnalysisMicroelectronics Reliability, 2001
- Application of focused ion beam lift‐out specimen preparation to TEM, SEM, STEM, AES and SIMS analysisSurface and Interface Analysis, 2001
- Focused ion beam/lift-out transmission electron microscopy cross sections of block copolymer films ordered on silicon substratesPolymer, 2001
- Sharpening of field-ion specimens and positioning of features of interest by ion-beam millingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Field-ion specimen preparation using focused ion-beam millingUltramicroscopy, 1999
- On the many advantages of local-electrode atom probesUltramicroscopy, 1996
- Field-ion microscopy-a review of basic principles and selected applicationsJournal of Physics E: Scientific Instruments, 1982