Epitaxial growth of sol-gel PLZT thin films
- 1 February 1994
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 9 (2), 420-425
- https://doi.org/10.1557/jmr.1994.0420
Abstract
Epitaxial lead lanthanum zirconate titanate [PLZT(9/50/50)] thin films were fabricated on various single crystal substrates using the spin coating of metallo-organic solutions. The films were heat-treated at 700 °C for 1 h using the direct insertion method. The films were epitaxially grown with (100), (100), and (110) being parallel to the SrTiO3(100), the MgO(100), and the sapphire (0112) substrates, respectively. The epitaxy of the films was investigated using x-ray diffraction, pole figures, rocking curves, and scanning electron microscopy.Keywords
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