Metalorganic chemical vapor deposition of anatase titanium dioxide on Si: Modifying the interface by pre-oxidation
- 20 April 2003
- journal article
- Published by Elsevier in Surface Science
- Vol. 530 (1-2), 63-70
- https://doi.org/10.1016/s0039-6028(03)00386-8
Abstract
No abstract availableKeywords
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