Integrated all-silicon color filtering element with an enhanced wavelength tunability
- 1 July 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 9 (7), 337-339
- https://doi.org/10.1109/55.736
Abstract
A method for applying the wavelength-dependent response of silicon photodiodes for the integration of an electronically tunable optical filtering element with the photodetector in silicon is presented. Previous sensors suffered from a limited tunable spectral range. Here, the filter tunability is extended by enhancing the long-wavelength tunability using an extra implantation for realizing a higher doped buffer layer underneath a shallow junction to reduce the built-in depletion layer. Also, an independent electronically programmable short-wavelength cutoff is introduced. The latter is based on the control of the surface space-charge region. The flexibility obtained allows the electronic shaping of clearly distinguishable responses using a single photodiode.<>Keywords
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