Influence of Damage Depth Profile on the Characteristics of Shallow p+/n Implanted Junctions
- 16 March 1986
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 94 (1), 315-319
- https://doi.org/10.1002/pssa.2210940138
Abstract
No abstract availableKeywords
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