Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations
- 5 April 1999
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 74 (14), 1987-1989
- https://doi.org/10.1063/1.123722
Abstract
Two main assumptions which underlie the Stoney formula relating substrate curvature to mismatch strain in a bonded thin film are that the film is very thin compared to the substrate, and the deformations are infinitesimally small. Expressions for the curvature–strain relationship are derived for cases in which these assumptions are relaxed, thereby providing a basis for interpretation of experimental observations for a broader class of film–substrate configurations.Keywords
This publication has 11 references indexed in Scilit:
- SiGe Island Shape Transitions Induced by Elastic RepulsionPhysical Review Letters, 1998
- Real-time stress evolution during Si1-xGex Heteroepitaxy: Dislocations, islanding, and segregationJournal of Electronic Materials, 1997
- Some elementary connections between curvature and mismatch strain in compositionally graded thin filmsJournal of the Mechanics and Physics of Solids, 1996
- Small and large deformation of thick and thin-film multi-layers: Effects of layer geometry, plasticity and compositional gradientsJournal of the Mechanics and Physics of Solids, 1996
- The Mechanics of a Free-Standing Strained Film / Compliant Substrate SystemMRS Proceedings, 1996
- The stress distribution and curvature of a general compositionally graded semiconductor layerJournal of Crystal Growth, 1993
- Geometrically nonlinear stress-deflection relations for thin film/substrate systemsInternational Journal of Engineering Science, 1993
- Mechanical properties of thin filmsMetallurgical Transactions A, 1989
- Principles and Applications of Wafer Curvature Techniques for Stress Measurements in Thin FilmsMRS Proceedings, 1988
- The tension of metallic films deposited by electrolysisProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1909