Phase imaging in reflection with the acoustic microscope
- 15 December 1977
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 31 (12), 791-793
- https://doi.org/10.1063/1.89551
Abstract
When a polished surface of a single crystal is examined with a converging acoustic beam the reflected signal has a characteristic response that is dependent upon the elastic properties of the reflecting surface. This property can be used in the acoustic microscope to monitor the thickness of layers deposited on these surfaces and the small‐scale variations of the elastic parameters in these materials.Keywords
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