Deep level defects in n-type GaN

Abstract
In n‐type GaN grown by metalorganic chemical vapor deposition two new electronic defects were detected and characterized by deep level transient spectroscopy(DLTS). Schottky‐barrier diodes with Ohmic back contacts and low series resistance were fabricated in GaN layers grown on sapphire. The diodes display well behaved current‐voltage and capacitance‐voltage characteristics and permit unambiguous DLTS evaluation. The new deep levels display thermal activation energies for electron emission of 0.49 and 0.18 eV.