Fluorocarbon film for protection from alkaline etchant and elimination of in-use stiction
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 695-698
- https://doi.org/10.1109/sensor.1997.613747
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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