A passive humidity monitoring system for in-situ remote wireless testing of micropackages
- 7 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Accelerated testing of anodically bonded glass-silicon packages in salt waterPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A high-sensitivity polyimide humidity sensor for monitoring hermetic micropackagesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1999
- A hermetic glass-silicon micropackage with high-density on-chip feedthroughs for sensors and actuatorsJournal of Microelectromechanical Systems, 1996