Molecular beam system controlled by quadrupole mass spectrometer
- 1 November 1977
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 10 (11), 1153-1155
- https://doi.org/10.1088/0022-3735/10/11/018
Abstract
A molecular beam epitaxy (MBE) apparatus is described in which some improvements over earlier systems have been achieved. An isolation valve permits the introduction of samples without disturbing the ultra-high vacuum system. The beam fluxes are controlled by a quadrupole mass spectrometer; by this means beams of gallium and arsenic can be kept constant to within 1 and 3% respectively.Keywords
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