Low-Loss Channel Waveguides in MgO:LiNbO3 and LiTaO3 by Pyrophosphoric Acid Proton Exchange

Abstract
The characteristics of proton-exchanged MgO-doped LiNbO3 (MgO:LiNbO3) and LiTaO3 waveguides fabricated by the pyrophosphoric acid process are reported. Using this process, low-loss (0.4 dB/cm) channel waveguides in MgO:LiNbO3 have been realized at 633 nm without annealing. The optical damage in MgO:LiNbO3 waveguides at 441.6 nm wavelength is lower than that obtained in LiNbO3. For LiTaO3, by annealing, low-loss (0.3 dB/cm) channel waveguides can be fabricated by pyrophosphoric acid proton exchange. No optical damage was observed in the LiTaO3 waveguides even when the incident power was above 1 mW at 442 nm.
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