Model of rf discharges at frequencies greater than the ionic plasma frequency
- 20 April 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (16), 1047-1049
- https://doi.org/10.1063/1.97965
Abstract
The extension of a previous model using an asymmetrical double‐probe theory is set out to describe rf discharges in the opposite limit of mainly capacitive electrode sheaths. It reasonably agrees with available experimental results for an excitation frequency equal to or greater than 13.56 MHz.Keywords
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