Fabrication of Josephson Junctions by Focused Electron Beam Irradiation
- 1 April 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (4B), L578-580
- https://doi.org/10.1143/jjap.33.l578
Abstract
The YBa2Cu3O x (YBCO) films patterned to a bridge shape were locally irradiated by a focused electron beam of 4 nm diameter in a transmission electron microscope. Electron beam irradiation allowed controlled reduction of the critical currents and raised the normal state resistance of the films. Irradiated films exhibited Shapiro steps when exposed to microwave irradiation. It was found that irradiated films functioned as Josephson junctions.Keywords
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