Uniform And Large Area Deposition Of Diamond-Like Carbon Using Rf Source Ion Beam
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Synthesis and characterization of diamond-like carbon films for optical and mechanical applicationsSurface and Coatings Technology, 1992
- Ion-beam-deposited polycrystalline diamondlike filmsApplied Physics Letters, 1976