Solute Segregation and Dynamics of Solid-Phase Crystallization In in and Sb-Implanted Silicon
- 1 January 1981
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Direct observation of laser-induced solid-phase epitaxial crystallization by time-resolved optical reflectivityApplied Physics Letters, 1980
- Incorporation of implanted In and Sb in silicon during amorphous layer regrowthJournal of Applied Physics, 1979
- Regrowth of amorphous filmsJournal of Vacuum Science and Technology, 1978