SIMS micro-analysis with a gallium ion microprobe
- 15 December 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 218 (1-3), 375-382
- https://doi.org/10.1016/0167-5087(83)91009-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Dynamic range of 106 in depth profiling using secondary-ion mass spectrometryApplied Physics Letters, 1980
- Quantitative secondary ion mass spectrometry: A reviewSurface and Interface Analysis, 1980
- Atom-probe field-ion microscopy of a high intensity gallium ion sourceJournal of Vacuum Science and Technology, 1980
- High-resolution, ion-beam processes for microstructure fabricationJournal of Vacuum Science and Technology, 1979
- Ion microscopyAnalytical Chemistry, 1975