X-Ray Reflectometry from Semiconductor Surfaces and Interfaces
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- High-resolution small-angle x-ray diffraction studies of evaporated silicon and germanium layersJournal of Physics D: Applied Physics, 1989
- Structural studies of Langmuir-Blodgett multilayers by means of soft X-ray diffractionThin Solid Films, 1989
- A neutron reflectivity study of hydrogenated silicon-silicon oxide thin filmsSemiconductor Science and Technology, 1989
- High-energy double-crystal X-ray diffractionJournal of Applied Crystallography, 1988
- Characterization of nanometer-scale epitaxial structures by grazing-incidence x-ray diffraction and specular reflectivityJournal of Applied Physics, 1988
- Characterization of the structure of Langmuir-Blodgett films by short-wavelength radiationsThin Solid Films, 1987
- X-ray scattering studies of thin films and surfaces: thermal oxides on siliconJournal of Physics D: Applied Physics, 1987
- Surface Studies of Solids by Total Reflection of X-RaysPhysical Review B, 1954