The incorporation of Ga during LPE growth of In0.53Ga0.47As on (111)B and (100) InP substrates
- 1 September 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 33 (5), 463-465
- https://doi.org/10.1063/1.90380
Abstract
We report the temperature dependence of the incorporation of Ga during LPE growth of In0.53Ga0.47As on (111) B‐ and (100) ‐oriented InP substrates. The distribution coefficients of Ga can be accurately represented by KGa(111)B =6.40×10−6 exp(1.10/kT) and KGa(100)=5.02×10−13 exp(2.37/kT), which are equal at 629 °C. The difference in activation energies is the source of the ’’discrepancy’’ reported by Pearsall etal. that KGa(111)B<KGa(100) at 621 °C while from our results KGa(111)B≳KGa(100) at 650 °C.Keywords
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