Refractive micro lens array made of dichromate gelatin with gray-tone photolithography
- 30 September 2001
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 57-58, 729-735
- https://doi.org/10.1016/s0167-9317(01)00555-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Coding gray-tone mask for refractive microlens fabricationMicroelectronic Engineering, 2000
- Simulation and Process Design of Gray-Tone Lithography for the Fabrication of Arbitrarily Shaped SurfacesJapanese Journal of Applied Physics, 1994
- Spatial Resolution of Relief Holograms in Dichromated GelatinApplied Optics, 1971
- Phase Holograms in Dichromated GelatinApplied Optics, 1968