Coding gray-tone mask for refractive microlens fabrication
- 30 June 2000
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 53 (1-4), 531-534
- https://doi.org/10.1016/s0167-9317(00)00371-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- One-step 3D shaping using a gray-tone mask for optical and microelectronic applicationsMicroelectronic Engineering, 1994
- Characterization of positive photoresistIEEE Transactions on Electron Devices, 1975
- Complex Spatial Filtering with Binary MasksApplied Optics, 1966