Tilting angle dependence of Rutherford backscattering: Uniformity of near surface layers
- 1 March 1978
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 149 (1-3), 229-233
- https://doi.org/10.1016/0029-554x(78)90865-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- The optimization of a rutherford backscattering geometry for enhanced depth resolutionNuclear Instruments and Methods, 1975
- Influence of implanted dose on the recrystallization of Si amorphous layerApplied Physics Letters, 1975
- Determination of concentration profile in thin metallic films: Applications and limitations of He+ backscatteringThin Solid Films, 1975
- Range and stopping power effects obtained from high resolution rutherford backscattering analysis of implanted targetsRadiation Effects, 1974