Determination of the hydrogen content of a-Si films by infrared spectroscopy and 25 MeV α-particle elastic scattering
- 30 January 1981
- journal article
- Published by IOP Publishing in Journal of Physics C: Solid State Physics
- Vol. 14 (3), 309-318
- https://doi.org/10.1088/0022-3719/14/3/014
Abstract
The simultaneous hydrogen and silicon atom densities in amorphous silicon, a-Si, films prepared by the glow discharge technique have been measured by 25 MeV alpha -particle elastic scattering. Integrated band intensities for the silicon-hydrogen stretching modes, omega 1s and omega 2s, in the region 1800 to 2200 cm-1 were determined for the same freely supported films. A similar analysis has been carried out for the bands observed at 890, 840 and 640 cm-1. Effective oscillator strengths for the omega 1s and omega 2s modes in a-Si films have been estimated and compared with the current theories on the effect of the silicon matrix on the infrared absorption characteristics.Keywords
This publication has 16 references indexed in Scilit:
- Thermal dehydrogenation of glow discharge a-SiJournal of Non-Crystalline Solids, 1980
- Hydrogen content and density of plasma-deposited amorphous silicon-hydrogenJournal of Applied Physics, 1979
- Infrared vibrational spectra of rf-sputtered hydrogenated amorphous siliconPhysical Review B, 1978
- Optical interference method for the approximate determination of refractive index and thickness of a transparent layerApplied Optics, 1978
- Hydrogen bonding in silicon-hydrogen alloysPhilosophical Magazine Part B, 1978
- The use of nuclear reactions and SIMS for quantitative depth profiling of hydrogen in amorphous siliconApplied Physics Letters, 1977
- Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputteringPhysical Review B, 1977
- Quantitative analysis of hydrogen in glow discharge amorphous siliconApplied Physics Letters, 1977
- Optical model analysis of the elastic scattering of 20–24 MeV α-particles by 12C, 14N, 16O and 20NeNuclear Physics A, 1977
- The general purpose charged particle scattering chamber on the University of Birmingham A.V.F. cyclotronNuclear Instruments and Methods, 1972