Extraction of Positive Ions from Electrodeless Discharge

1 September 1966

journal article
research article
Published by AIP Publishing in Review of Scientific Instruments

Vol. 37 (9), 1205-1210
https://doi.org/10.1063/1.1720458

Abstract

The positive ion current extracted from an electrodeless discharge is studied as a function of the discharge parameters of oscillator input power and frequency, gas pressure, magnetic field, extraction voltage, and extraction electrode geometry. A greatly enhanced ion current is obtained by operating the discharge at a pressure of several microns of mercury and applying a static magnetic field either parallel or perpendicular to the magnetic component of the high frequency electromagnetic field. Mean beam energies up to 200 eV above the extraction voltage and beam energy spreads of 50 eV are observed and studied as functions of the discharge parameters.

Keywords

This publication has 8 references indexed in Scilit:

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