Pulsed laser deposition of titanium nitride and diamond-like carbon films on polymers
- 1 January 1996
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 25 (1), 151-156
- https://doi.org/10.1007/bf02666189
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Preparation of diamondlike carbon films by high-intensity pulsed-ion-beam depositionJournal of Applied Physics, 1994
- The effects of ion bombarding energy on the structure and properties of TiN films synthesized by dual ion beam sputteringJournal of Applied Physics, 1994
- Thin film properties of low-pressure chemical vapor deposition TiN barrier for ultra-large-scale integration applicationsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- DLC film preparation by LASER-ARC and properties studyDiamond and Related Materials, 1992
- Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamondJournal of Applied Physics, 1991
- Thin-film deposition by a new laser ablation and plasma hybrid techniqueApplied Physics Letters, 1989
- Low-temperature processing of titanium nitride films by laser physical vapor depositionApplied Physics Letters, 1989
- A review of adhesion test methods for thin hard coatingsJournal of Vacuum Science & Technology A, 1986
- Quantitative auger electron analysis of titanium nitridesSurface Science, 1985
- Resonant Raman scattering in a superconducting transition metal compoundTiNSolid State Communications, 1975