RF micromachined varactors with wide tuning range
- 27 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1 (0149645X), 357-360
- https://doi.org/10.1109/mwsym.1998.689392
Abstract
Polysilicon surface micromachined varactors using two- and three-plate structures with 1.5:1 and 1.87:1 tuning ranges, respectively, are presented. The tuning ranges are near-theoretical limits and can be obtained within 4.4 V control voltage. The two-plate varactor has a nominal capacitance of 2.05 pF and a Q-factor of 20 at 1 GHz.Keywords
This publication has 3 references indexed in Scilit:
- Micromachined varactor with wide tuning rangeElectronics Letters, 1997
- A Si 1.8 GHz RLC filter with tunable center frequency and quality factorIEEE Journal of Solid-State Circuits, 1996
- Silicon as a mechanical materialProceedings of the IEEE, 1982