Standing Waves along a Microwave Generated Surface Wave Plasma

Abstract

Two surface wave plasma columns, generated by microwave power in argon at gas pressures of 0.05 torr to 330 torr, interact in the same discharge tube to form standing surface waves. Radial electric field Er and azimuthal magnetic field Hϕ outside the discharge tube are measured to be 90° out of phase with respect to axial position and to decay exponentially with radial distance from the tube axis. Maximum light emission occurs at the position of maximum Hϕ, and minimum Er. Electron temperature and density are measured at low pressures with double probes inserted into the plasma at a null of Er. Measured electron densities compare well with those predicted by Gould-Trivelpiece (GT) surface wave theory. Measured electron temperatures are the same order of magnitude as temperatures predicted by positive column theory.