Phase evolution in boron nitride thin films
- 1 June 1993
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 8 (6), 1213-1216
- https://doi.org/10.1557/jmr.1993.1213
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Phase control of cubic boron nitride thin filmsJournal of Applied Physics, 1992
- Substrate temperature influence of c-BN thin film formation by IBEDDiamond and Related Materials, 1992
- Cubic boron nitride: synthesis, physicochemical properties and applicationsMaterials Science and Engineering B, 1991
- Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3 and NaBH4Surface and Coatings Technology, 1989
- Ultraviolet light-emitting diode of a cubic boron nitride p n junction made at high pressureApplied Physics Letters, 1988
- Preparation of cubic boron nitride film by activated reactive evaporation with a gas activation nozzleJournal of Vacuum Science & Technology A, 1987