Laser photoelectron spectrometry measurement of characteristic electronic and vibrational temperatures of sputtered negative ions
- 1 April 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 36 (7), 533-535
- https://doi.org/10.1063/1.91569
Abstract
The techniques of laser photoelectron spectrometry are used to characterize directly the internal energy distribution of sputtered negative ions. Effective temperatures of Telec≈1500±500 K and Tvib ≈5000±1000 K are determined. The excited electronic and vibrational state populations are not in equilibrium, in contrast to predictions of the local thermodynamic equilibrium model of sputtering.Keywords
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