Investigations on the HCl gas‐phase etching of differently doped and oriented gaas crystals
- 1 January 1983
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 18 (11), 1359-1368
- https://doi.org/10.1002/crat.2170181109
Abstract
No abstract availableKeywords
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