Development and evaluation of refractory CVD coatings as contact materials for molten silicon
- 1 September 1980
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 50 (1), 347-365
- https://doi.org/10.1016/0022-0248(80)90259-6
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Materials of construction for silicon crystal growthJournal of Crystal Growth, 1980
- Chemically Bound Hydrogen in CVD Si3 N 4: Dependence on NH 3 / SiH4 Ratio and on AnnealingJournal of the Electrochemical Society, 1977
- Sialons and related nitrogen ceramicsJournal of Materials Science, 1976
- The effect of rapid early growth on the physical and electrical properties of heteroepitaxial siliconJournal of Crystal Growth, 1975
- Hot‐Pressing Behavior of Si3N4Journal of the American Ceramic Society, 1974