The Effect of Polysilicon Deposition and Doping Processes on Double-Poly Capacitors - Electrical and AFM Evaluation
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Review of scanning force microscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Scanning probe microscopy: Current status and future trendsJournal of Vacuum Science & Technology A, 1990
- Impact of Polycrystalline Silicon Processing on Properties of MOS Memory DevicesMRS Proceedings, 1990
- Polarity asymmetry of oxides grown on polycrystalline siliconIEEE Transactions on Electron Devices, 1988