On the evaluation of depth resolution from depth profiles of multilayers: Comment on “multiple point depth profiling of multilayer Cr-Ni thin film structures deposited on a rough substrate using scanning Auger microscopy”
- 1 February 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 136 (1), L23-L26
- https://doi.org/10.1016/0040-6090(86)90119-7
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Multiple-point depth profiling of multilayer Cr/Ni thin film structures on a rough substrate using scanning auger microscopyThin Solid Films, 1985
- Depth Resolution and Quantitative Evaluation of AES Sputtering ProfilesPublished by Springer Nature ,1984
- Physical Limitations to Sputter Profiling at Interfaces — Model Experiments with Ge/Si Using KARMAPublished by Springer Nature ,1984
- Quantitative depth profiling in surface analysis: A reviewSurface and Interface Analysis, 1980
- Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopyThin Solid Films, 1977