A new operating regime for electroplating the gold absorber on x-ray masks
- 31 January 1994
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 23 (1-4), 235-238
- https://doi.org/10.1016/0167-9317(94)90145-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- X-ray mask repair with focused ion beamsJournal of Vacuum Science & Technology B, 1990
- X-Ray Mask Distortion: Process And Pattern DependencePublished by SPIE-Intl Soc Optical Eng ,1986
- Dc Electroplating Of Sub-Micron Gold Patterns On X-Ray MasksPublished by SPIE-Intl Soc Optical Eng ,1984